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PE-Kleen G2 Filters and PE-Kleen SWD Capsules

Overview
Specifications
Performance
Ordering Information
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The PE-Kleen G2 filter combines the latest advances in polyethylene membrane technology with Pall’s unique crescent-shaped Ultipleat® filter technology. The result is a cartridge with the outstanding particle retention characteristics required by the semiconductor industry.

The PE-Kleen G2 filter is specifically designed for the filtration of ultra-high-purity chemicals, including organic stripper and DHF.

The PE-Kleen SWD capsules are space-saving filter units. They are ideally suited for installing into single wafer cleaning systems.

Features

  • Excellent gel-retention characteristics
  • High flow rates
  • Low extractables
  • 100% integrity tested
  • Manufactured in a cleanroom environment
  • 100% prewetted with ultrapure water in package
  • Compact space-saver capsules

Specifications

Materials of Construction

Components Materials
Filter Medium HDPE (High density polyethylene)
Support and drainage HDPE
Core,cage and end caps HDPE
Housing HDPE
O-ring options FEP encapsulated fluoroelastomer, Perfluoroelastomer

1 Package is completely filled with ultrapure water.

Product Name PE-Kleen G2 Filters PE-Kleen SWD Capsules
Removal Ratings 10 nm 5 nm, 10 nm
Configurations ABDG type cartridge U-flow capsule
Nominal Filter Areas ABDG1 2.6 m2 / 28 ft2
ABDG2 5.2 m2 / 56 ft2
ABDG3 7.8 m2 / 84 ft2		 0.28 m2 / 3.0 ft2
Maximum Operating Temperature 60 °C / 140 °F
Maximum forward differential pressure 0.34 MPa / 49 psid @ 40 °C / 104 °F  
Maximum Operating Pressure   0.35 MPaG / 51 psig ‹ 38 °C / 100 °F
0.17 MPaG / 25 psig ‹ 60 °C / 140 °F

Performance

Typical Flow Characteristics – 1 cP fluid, 20 °C

Part Numbers / Ordering Information

Part Numbers / Ordering Information4

PE-Kleen G2 Filter

ABDG [1] UG [2] [3] E [4] [5]

Table 1

Code Nominal length (mm / in)
1 241 / 9.5
2 484 / 19.1
3 723 / 28.5

Table 2

Code Removal ratings
001 10 nm

Table 3

Code Configurations
3 222 O-ring open end flat closed end

Table 4

Code O-ring materials
H1 FEP encapsulated fluoroelastomer
H11 Perfluoroelastomer

Table 5

Code Packaging
K3 Prewet5
Blank Dry

PE-Kleen SWD Capsules

SWD03 [1] 4E71 [2]

Table 1

Code Removal Ratings
UG5 5 nm
UG001 10 nm

Table 2

Code Prewet Option
None Dry
-K13C Prewet filter (packaged in DI water), Low metal extractables6

Connections (Inlet / Outlet, Vent: ¼ in , Super Pillar 7 300 P series (Nippon Pillar)

4 Part numbers in combination with all codes are not always available. Please contact Pall for part number availability.

5When K3 is not included in the part number, the filter will be packaged dry.

6Please contact Pall for the extractable conditions.

7Pillar is a trademark of Nippon Pillar Packing Co.

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