Gasket-Sert™ PSP Filter

The Gasket-Sert PSP filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.

• True in-line design and easy installation
• Alignment retainer for ease of installation
• Fits in place of standard 1⁄4 in. VCR1 or 1⁄4 in. UJR compatible gasket
• Broad compatibility with process gases
• Low differential pressure
• All 316L stainless steel construction
• Dried with high purity nitrogen
• Cleanroom packaged
• No hold-up volume
• No particle contribution above background
• No housing required
• Retrofit of existing panels without reconfiguring of systems
• Zero displacement
• Protection for regulators and MFCs

¹ VCR is a trademark of Swagelok Co.