Specifications

Materials

316L stainless steel filter medium
316L stainless steel diffuser
Viton¹ O-ring
≤ 22 μin / 0.56 μm R_a internal surface finish

Removal Rating

≥ 0.003 μm
No particle contribution above background; ≤ 1 particle /(ft³ or m³)

Connections

1100 Series: NW25 ISO Vacuum Flange
5500 Series: NW63 ISO Vacuum Flange

Operating Conditions

Design Flow Rate²
- 1100 Series: 15 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
- 5500 Series: 150 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
Maximum Operating Temperature
- 1100, 5500 Series: 300°F / 149°C (limited by O-ring flange connection)

Recommended Applications

Vacuum chamber
Load lock chamber

1 Viton is a registered trademark of DuPont Dow Elastomers
2 Additional designs are available. Please contact Pall Microelectronics for more information.

Performance

Pressure vs. Average Flow Rate

Pressure vs. Chamber Fill Time

Dimensions

Ordering Information

Part Number	Description	Design Flow Rate³ (slpm)
CK1100I25H	1100 Series, 316L stainless steel filter, Viton¹ O-ring	0-15
CK5500I63H	5500 Series, 316L stainless steel filter, Viton O-ring	0-150

3 Reference Design Flow Rate on page 182 of catalog.

Unit conversion: 1 bar = 100 kilopascals

Get In Touch

Please fill out the form below with your details and message, and we'll get back to you as soon as possible.

Name*

Phone

Email*

Company*

Your Question*

I would like to receive more information about ABLROOTS INDUSTRIES products and services, and related product and services from ABLROOTS INDUSTRIES related companies via email or phone.

More Products

Emflon® PF Filter (Gas Filtration)

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote

Gasket-Sert™ PSP Filter

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote

High-Flow Emflon® Filter Element

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote