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Gasket-Sert™ PSP Filter

Overview
Specifications
Performance
Ordering Information
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The Gasket-Sert PSP filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.

  • True in-line design and easy installation
  • Alignment retainer for ease of installation
  • Fits in place of standard 1⁄4 in. VCR1 or 1⁄4 in. UJR compatible gasket
  • Broad compatibility with process gases
  • Low differential pressure
  • All 316L stainless steel construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No hold-up volume
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs

    • 1 VCR is a trademark of Swagelok Co.

    Specifications

    Materials
    • Medium and gasket: 316L stainless steel
    Removal Rating
    • ≥ 0.4 μm at 99.9% efficiency
    Operating Conditions
    • Recommended flow range: 0-28 slpm / 0-1 scfm
    • Maximum operating temperature:
      • Inert gases: 300 °C / 572 °F
      • Anhydrous corrosive gases: 30 °C / 86 °F
    • Maximum differential pressure:
      • Inside out:
        690 kPa @ 20 °C / 100 psid @ 68 °F
      • Outside in:
        1380 kPa @ 20 °C / 200 psid @ 68 °F

    Performance

    Pressure Drop vs. Gas Flow Rate

    Dimensions

    Ordering Information

    Part Number Material of Construction Fitting Type
    CNF1104USG4 All 316L stainless steel 1⁄4 in. VCR or 1⁄4 in. UJR

    Unit conversion: 1 bar = 100 kilopascals

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